REFLOW PROCESSING APPARATUS AND REFLOW PROCESSING METHOD

摘要

A reflow treating apparatus and a reflow treating method are provided to prevent density variation of a solvent of a reflow treating part in transferring a substrate by installing a unit for preventing solvent density variation in a top end and a bottom end of a bottom part of a nozzle unit. A reflow treating apparatus(100) includes a transfer passage(T) and a transfer unit(8,9). A substrate(G) is vertically transferred in the reflow treating apparatus. The transfer unit transfers the substrate according to the transfer passage. The substrate passes through a transfer space(3) including the transfer passage. A nozzle unit(10) includes a solvent inlet nozzle(6) and a solvent outlet nozzle(7). The nozzle unit forms a reflow treating part(P) by controlling the solvent through the solvent inlet nozzle and the solvent outlet nozzle.