摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyroscope capable of achieving a compact piezoelectric single crystal vibrator and using a low-cost and highly sensitive tuning fork type piezoelectric single crystal vibrator. <P>SOLUTION: The tuning fork type piezoelectric single crystal vibrator 2 is constituted of a first vibrating arm 31a, a second vibrating arm 31b, which are vibrating parts, and a base 32 for supporting the vibrating arms. A detection electrode 33a is formed by electrically connecting a detection electrode provided for the outside of the first vibrating arm 31a to a detection electrode provided for a center of the second vibrating arm 31b on the tuning fork type piezoelectric single crystal vibrator 2. A detection electrode 33b is similarly formed by electrically connecting a detection electrode provided for the outside of the second vibrating arm 31b to a detection electrode provided for a center of the first vibrating arm 31a on the tuning fork type piezoelectric single crystal vibrator 2. Angular velocities are detected on the basis of output signals detected by the detection electrodes 33a and 33b. <P>COPYRIGHT: (C)2009,JPO&INPIT |