| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation imaging device that effectively suppresses noise and obtains high image quality. SOLUTION: The radiation imaging device includes each radiation sensor arranged in a shape of a matrix for generating a signal charge based on the radiation beam, which penetrated a photographic object, and an FET for reading out a signal from the sensor. In this case, the FET includes at least a gate electrode, a gate insulating film, an active layer, a source electrode, and a drain electrode. The active layer has at least a first region and a second region with electrical conductivity larger than that of the first region. The second region adjoins the gate insulating film, and the first electrode is electrically connected with a position between the second region and at least one of the source electrode and the drain electrode in the radiation image sensor. COPYRIGHT: (C)2009,JPO&INPIT
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