| 发明名称 |
FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE |
| 摘要 |
A method for fabricating a micro-electro-mechanical system (MEMS) device. The method comprises fabricating a MEMS part on a substrate, and detaching the MEMS part from the substrate. After detaching the MEMS part from the substrate, attaching the MEMS part to an application platform.
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| 申请公布号 |
US2009144970(A1) |
申请公布日期 |
2009.06.11 |
| 申请号 |
US20070951772 |
申请日期 |
2007.12.06 |
| 申请人 |
WINMEMS TECHNOLOGIES HOLDINGS CO., LTD. |
发明人 |
HSU TSENG-YANG;LAI CHIH-HSIANG |
| 分类号 |
H01L21/00;B23G1/22;H05K3/00;H05K3/30 |
主分类号 |
H01L21/00 |
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