IONISATION DETECTOR FOR ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

摘要

lonisation detector of an environmental scanning electron microscope consists of a specimen chamber (1) separated from a pole piece (4) of the microscope with an aperture (2) for pass of a primary electron beam (3) and with a sample holder (6) and at least one detection electrode (7). A flat detection electrode (7) surrounds the sample on the sample plane or under the sample plane and the active side of the detection electrode (7) faces the incoming primary electron beam (3). Electrostatic field defining the trajectories of the secondary electrons is formed with separation electrodes, including a retarding electrode (8), a suction electrode (9) and a ring electrode (11).