发明名称 |
Proximity head with angled vacuum conduit system, apparatus and method |
摘要 |
A proximity head including a head surface. The head surface including a first flat region and a plurality of first conduits. Each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes. The plurality of first discrete holes residing in the head surface and extending through the first flat region. The head surface also including a second flat region and a plurality of second conduits. The plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region. The head surface also including a third flat region disposed between and adjacent to the first flat region and the second flat region and a plurality of third conduits. The plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region. The third conduits being formed at a first angle relative to the third flat region. The first angle being between 30 and 60 degrees. A system and method for processing a substrate with a proximity head is also described.
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申请公布号 |
US2009145464(A1) |
申请公布日期 |
2009.06.11 |
申请号 |
US20070731532 |
申请日期 |
2007.03.30 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
RAVKIN MICHAEL;DE LARIOS JOHN M.;REDEKER FRED C.;KOROLIK MIKHAIL;FREER ERIK M. |
分类号 |
B08B3/10;B08B3/04;B08B5/04;B08B9/027 |
主分类号 |
B08B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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