| 摘要 |
The present invention provides an apparatus (1) for testing an optoelectronic module (10), said apparatus comprising a first source (11) for generating an electromagnetic beam or particle beam (15), a second source (12) for illuminating the optoelectronic module (10) and a detector (13). A method for testing an optoelectronic module (10) is also provided, said method involving illuminating the optoelectronic module (10), directing an electromagnetic beam or particle beam (15) and detecting defects in the optoelectronic module (10). Defects which could not be detected without illumination are made visible by the illumination which is additional to the electromagnetic beam or particle beam (15).
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