ROLLERS FOR TRANSPORTING THIN SUBSTRATE AND CHEMICAL TREATMENT METHOD USING THE SAME

摘要

Rollers for transporting thin substrate (16), which comprises an upper roller (12) fixed upper roller shaft (10) and a lower roller (18) fixed lower roller shaft. The upper and lower roller rotates at same linear speed along clockwise direction and counterclockwise direction respectively, which allows the thin substrate to displace towards one direction. The upper roller includes a fixed roller and elastic piece fixed around the outer circumference surface of the roller. A chemical treatment method using the rollers for transporting thin substrate, which allows the thin substrate to displace continuously by using one or more sets of the above-mentioned rollers and to subjected to wet chemical processed using solution. The upper transporting rollers, under different conditions, guarantee stable transporting of the thin substrate even if the thin substrate disengages the lower roller, in order to obtain continuous wet chemical treatment.