| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lighting technology that reduces an adhesion amount of particulates such as debris to an reflective optical element. <P>SOLUTION: A reflective lighting optical device for leading exposure light EL to a reticle face Ra through a curved mirror 24, a concave surface mirror 25, and the like, includes a vacuum chamber 1 for housing the curved mirror 24, the concave surface mirror 25, and the like, and a subchamber 4D arranged in the vacuum chamber 1 and housing the curved mirror 24. The subchamber 4D has openings 4Da and 4Db through which the exposure light EL incident to the curved mirror 24 passes, and the openings 4Da and 4Db are arranged in the vicinity of a position where the cross section of a light beam is smallest. The adhesion amount of particulates such as debris to an reflective optical element can be reduced without excessively enhancing the ability of an evacuation mechanism. <P>COPYRIGHT: (C)2009,JPO&INPIT |
