| 摘要 |
PROBLEM TO BE SOLVED: To inspect the temperature characteristics of an active layer in a thin-film transistor during operation. SOLUTION: A semiconductor device for evaluating the temperature characteristics of a thin-film transistor includes a thin-film transistor having an active layer 14 including a channel region 142, and a temperature-sensitive portion 12 consisting of a semiconductor material and arranged in the channel region 142 of a thin-film transistor through an insulating film 13. COPYRIGHT: (C)2009,JPO&INPIT
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