| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance X-ray detector and its manufacturing method. SOLUTION: The area of a transparent conductive film 39 is made larger compared with the area of an amorphous silicon film 35 and the peripheral part 39a of the transparent conductive film 39 is projected than the side surface of the amorphous silicon film 35. Electric current, necessary for the driving of a photodiode element 18, is supplied from the whole surface of the amorphous silicon film 35 to improve the responsibility of the photodiode element 18. The amount of incident fluorescent light into the amorphous silicon film 35 is increased by the transparent conductive film 39 having the function of reflection preventive film to improve the sensitivity of the photodiode element 18. Even when a high electric field necessary for the operation of the photodiode element 18 is impressed on the amorphous silicon film 35, leakage current, which flows through the side surface of the amorphous silicon film 35, is not increased and the performance of the photodiode element 18 is improved. COPYRIGHT: (C)2009,JPO&INPIT
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