| 摘要 |
PROBLEM TO BE SOLVED: To provide an absolute position measuring device which is suitable for wide angle range measurement and which provides high precision, high resolution, and easy data processing. SOLUTION: The absolute position measuring device is suitable for wide angle range measurement and provides high precision, high resolution and easy data processing. The device includes a disk capacitive sensor 1-3, a measurement signal processing unit 4-5, a data processing unit 6, and a display unit 7. The disk capacitive sensor 1-3 includes a rough division sensor 12, and a fine division sensor 11. The pitch point value of the fine division sensor 11 is at least two times larger than the resolution of the rough division sensor 12. The rough division sensor 12 and the fine division sensor 11 have the same zero position. The grids of the rough division sensor 12 and the fine division sensor 11 are independent of each other, are free of electric coherence, and are fixed relative to each other. The grid has an exclusive absolute displacement value within a single pitch measurement range. COPYRIGHT: (C)2009,JPO&INPIT
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