| 摘要 |
PROBLEM TO BE SOLVED: To shorten an inspection time by a defect inspection device, to enhance an inspection capacity, and to enhance a production capacity. SOLUTION: This defect inspection method is a method for inspecting a defect of an inspection object having a three-dimensional shape, based on a top view image and an image having height information, sets a measuring condition for acquiring preliminarily the image having the height information from a shape of the inspection object, acquires the top view image of an appearance by imaging the appearance of the inspection object, to extracts defect candidates, and extracts further the defect candidate of acquiring the image having the height information out of the defect candidates. The defect inspection method acquires the image having the height information in the selected measuring condition based on positional information of the defect candidate of acquiring the image having the height information, and inspects the defect of the inspection object, based on the image. COPYRIGHT: (C)2009,JPO&INPIT
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