| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering target material which can securely reduces the occurrence of arcing, and which can be restrained from being broken and cracked, and to provide a sputtering target obtained therefrom. SOLUTION: An almost planar sputtering target material is provided which has a rectangular sputtering surface, rectangular side surfaces and a rectangular bonding surface, wherein, a corner part formed resulting from abutting of at least the three surfaces among the plurality of surfaces composing the sputtering target material is chamfered. COPYRIGHT: (C)2009,JPO&INPIT
|
