发明名称 Optical element unit and method of supporting an optical element
摘要 There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.
申请公布号 US2009147229(A1) 申请公布日期 2009.06.11
申请号 US20070901131 申请日期 2007.09.14
申请人 CARL ZEISS SMT AG 发明人 SCHAFFER DIRK;HEINTEL WILLI;FEDERAU HAGEN;HARTJES JOACHIM;KIRCHNER HARALD
分类号 G03B27/54;G02B7/02 主分类号 G03B27/54
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