| 摘要 |
<p>A probe is provided with a beam section supported on one side by a supporting section, and a contact which extends downward in a right angle direction from the free end of the beam section. On a side portion of the contact on the fixed end side of the beam section, an outer cut section is formed, and on a side portion of the contact on the free end side of the beam section, an inner cut section is formed. The outer cut section and the inner cut section are formed so that the contact warps when the contact is brought into contact with an electrode of a subject to be inspected with a prescribed contact pressure. Thus, while maintaining suitable contact between the probe and the subject to be inspected, probe durability is improved for inspecting electrical characteristics of the subject to be inspected.</p> |
