发明名称 |
PROTECTIVE FILM FOR LASER PROCESSING AND PROCESSING METHOD USING THE SAME |
摘要 |
<p>Disclosed is a protective film for laser processing, which has high adhesiveness and is capable of protecting an object to be processed with a uniform thickness, while being prevented from carbonization/adhesion due to thickness variations. In addition, this protective film for laser processing is free from the problem of waste water contamination when it is removed. Also disclosed is a laser processing method using such a protective film. Specifically disclosed is a protective film for laser processing, which contains a (meth)acrylate copolymer and a radiation-polymerizable (meth)acrylate having an unsaturated bond.</p> |
申请公布号 |
WO2009072538(A1) |
申请公布日期 |
2009.06.11 |
申请号 |
WO2008JP72010 |
申请日期 |
2008.12.04 |
申请人 |
DENKI KAGAKU KOGYO KABUSHIKI KAISHA;TAKESUE, HIRONORI;TAGUCHI, KOICHI |
发明人 |
TAKESUE, HIRONORI;TAGUCHI, KOICHI |
分类号 |
H01L21/301;C08L33/04;B23K26/16;B23K26/18;C08F2/44 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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