| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip for preventing the disconnection of an electrode pattern conducted to an excitation electrode, and to provide a piezoelectric device and a method of manufacturing the piezoelectric vibration chip. <P>SOLUTION: In the piezoelectric vibration chip, the excitation electrode 30 is provided on main surfaces 12a, 12b of a piezoelectric element plate 12, and the electrode pattern 32 conducted to the excitation electrode 30 is provided at the side of a base end 18 for supporting the piezoelectric element plate 12 in cantilever. The piezoelectric vibration chip lays by wet etching when forming the external shape of the piezoelectric element plate 12, the electrode pattern 32 in a recess 22 where the angle made by one of main surfaces 12a, 12b of the piezoelectric element plate 12 and a side surface 12c becomes obtuse. <P>COPYRIGHT: (C)2009,JPO&INPIT |
