| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device capable of securing sufficient cleanliness around a target when the target is delivered between a space where cleanliness is maintained at a high level and a space with low cleanliness. SOLUTION: The carrying device 101 is provided with a clean space maintaining part 10 for defining a clean space having enhanced cleanliness compared to an external space by air circulation; an outer wall 3 having a delivery window 17 for delivering the target 11 between the clean space and the external space; a carriage storage region 5 for storing a carriage 4 to become the other party for delivering the target 11 outside the delivery window 17; and a blowing-down part 6 for delivery for blowing out downward an air flow with higher cleanliness than that of the external air above the carriage storage region 5. The outer wall 3 has an outer wall suction port 7 for sucking air from the carriage storage region 5 below the delivery window 17. COPYRIGHT: (C)2009,JPO&INPIT
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