发明名称 OXIDE SEMICONDUCTOR THIN-FILM TRANSISTOR
摘要 <p>A transistor includes a gate electrode, a gate insulating layer, a semiconductor layer including an amorphous oxide, source-drain electrodes, and a protective layer on a substrate. The semiconductor layer includes a first region corresponding to a region in which the source-drain electrodes are formed, and a second region not corresponding to the region in which the source-drain electrodes are formed. At least the first region includes a crystalline component having a composition different from the composition of the amorphous oxide in the second region.</p>
申请公布号 WO2009072533(A1) 申请公布日期 2009.06.11
申请号 WO2008JP71990 申请日期 2008.11.27
申请人 CANON KABUSHIKI KAISHA;SHIMADA, MIKIO 发明人 SHIMADA, MIKIO
分类号 H01L29/786 主分类号 H01L29/786
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