PIEZOELECTRIC MICRO SPEAKER USING MICRO ELECTRO MECHANICAL SYSTEMS AND MANUFACTURING METHOD THEREOF

摘要

A piezoelectric micro speaker and a manufacturing method thereof are provided to reduce a sudden change of an output sound pressure of a micro speaker by forming a resonant change part in a part of a piezoelectric body by a pattern. A piezoelectric body(107) is formed on a top part of an elastic thin film. A resonant change part(110) is formed on a part among a bottom part of the elastic thin film and a top part of the piezoelectric body by a pattern. The elastic thin film is made of one material among silicon, silicon oxide series, and silicon nitride series. The pattern of the resonant change part converts a resonant frequency of an audio frequency band generated in the piezoelectric body into frequency of an inaudible frequency band.