SEMICONDUCTOR INTERGRATED CIRCUITS INCLUDING A ELECTROOPTIC DEVICE FOR CHANGE OPTICAL PHASE

摘要

A semiconductor integrated circuit including a photoelectric device is provided to reduce a length of an optical waveguide part by installing the optical waveguide part of a thin thickness. A photoelectric device(150) is arranged on a substrate(100). The photoelectric device includes a semiconductor pattern(110). The semiconductor pattern includes an optical waveguide part(106) extended in a first direction and a pair of recessed parts(104) arranged in both sides of the optical waveguide part. The photoelectric device includes a first doped region(112) and a second doped region(114) formed in a pair of recessed parts. A first optical fiber is arranged on a top part of a first grating coupler. A second grating coupler is connected to an output terminal of the photoelectric device.