| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for continuously and stably circulating and supplying cleaned and temperature/humidity-controlled air to a clean work space over a long period of time by cleaning the exhaust air containing molecular contaminants exhausted from the clean work space in a substrate treatment process, in manufacturing LCDs, or the like, using an adsorbing material, after performing temperature/humidity control first without stopping the operation of a manufacturing equipment line. <P>SOLUTION: A method for cleaning exhausted air in a substrate treatment process cleans and controls the temperature and humidity of the exhaust air, in a substrate treatment process in manufacturing LCDs to circulate and supply it. The exhaust air is taken into a humidifying/cooling/heating apparatus as process air, to obtain humidified/cooled/heated air; and this is passed through a batch-type temperature swing adsorbing device by using the air taken in from the indoors or the outdoors as regenerated air, and temperature/humidity control and removal of molecular contaminants and particulate contaminants are carried out. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
