发明名称 |
PELLICLE, PELLICLE STORAGE CONTAINER STORING PELLICLE, AND METHOD FOR STORING PELLICLE IN PELLICLE STORAGE CONTAINER |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To store a large pellicle in a pellicle storage container without using a separator. <P>SOLUTION: A region not coated with a mask pressure-sensitive adhesive is provided in a part on an end face close to the mask pressure-sensitive adhesive of a pellicle frame; and the region not coated with the adhesive is mounted on a pellicle frame support comprising a silicone gel provided inside a pellicle storage container; and the pellicle frame is held and fixed to the pellicle storage container by a holding mechanism comprising pins inserted into holes formed in a side face of the pellicle frame. Since the pressure-sensitive adhesive layer can be protected without using the separator, a separator is unnecessary. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
申请公布号 |
JP2009128635(A) |
申请公布日期 |
2009.06.11 |
申请号 |
JP20070303443 |
申请日期 |
2007.11.22 |
申请人 |
SHIN ETSU CHEM CO LTD |
发明人 |
SEKIHARA KAZUTOSHI |
分类号 |
G03F1/40;G03F1/62;G03F1/66 |
主分类号 |
G03F1/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|