| 摘要 |
PROBLEM TO BE SOLVED: To provide a group-III nitride surface light-emitting element which can be manufactured with no lamination by a fusion method required, with the shape of a hole easily controlled, being adaptive to light-emitting devices of various structures, and to provide its manufacturing method. SOLUTION: A photonic laser 1 which is the group-III nitride surface light-emitting element comprises an n-type substrate 10 of GaN, and a photonic crystal layer 70 which is formed on one main surface 10A of the n-type substrate 10, with a plurality of holes 73 having a bottom wall 73A being periodically formed. The bottom wall 73A is covered with a coating layer 74 consisting of at least one selected from among oxide, nitride, fluoride, boride, or carbide of titanium, zirconium, or hafnium. The hole 73 is closed by a closing layer 72 so formed as to face the bottom wall 73A. COPYRIGHT: (C)2009,JPO&INPIT
|
