APPARATUS AND METHOD FOR SUPPLYING OZONATED WATER MIXTURE, AND SUBSTRATE TREATING FACILITY USING THE SAME

摘要

An apparatus and a method for supplying ozone water mixture, and a substrate treating facility using the same are provided to uniformly maintain density of ozone water mixture by discharging the ozone water mixture inside a distributor according to pressure variation of the distributor. A mixing unit(230) mixes ozone water to a treating solution. A distribution unit(240) receives the ozone water mixture from the mixing unit, and distributes the ozone water mixture to treating units. A discharge unit(250) discharges the ozone water mixture inside the distribution unit. A pressure detecting unit(260) senses pressure inside the distribution unit. A control unit(270) receives a detection signal from the pressure detecting unit, and controls operations of the discharge unit.