摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a photosensitive element capable of laminating a photosensitive resin layer free of the generation of air voids on a substrate having fine irregularity used for optical nanoimprint, and to provide a method for producing such a photosensitive element capable of laying a photosensitive resin layer on a substrate having fine irregularity used for optical nanoimprint without generating air voids with an inexpensive laminator which performs heating and pressing under ordinary pressure. <P>SOLUTION: The photosensitive element which transfers fine irregularity having a surface roughness of 0.01-2μm comprises a support film (A), a photosensitive resin composition layer (B) and a protective film (C), wherein the Ra of a surface of the protective film (C) brought into contact with the photosensitive resin composition layer is 0.05-0.5μm. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |