| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface processing apparatus capable of easily recognizing positions where operational faults have occurred. SOLUTION: In the HMDS processing apparatus, the pressure in a chamber 1 is detected by a pressure gage 10. It is discriminated based on the detection result whether or not the HMDS processing apparatus is operated normally. When it is determined not to be normally operated, the operation of the HMDS processing apparatus is stopped, and images indicating the contents of the operational faults and valves causing the operational faults are displayed on a monitor 26. Accordingly, the contents of operational faults and valves causing operational faults are easily detected. COPYRIGHT: (C)2009,JPO&INPIT
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