| 摘要 |
PROBLEM TO BE SOLVED: To prevent particles from being produced owing to a weld zone between a manifold flange and a gas intake port when substrate treating equipment which carries out gas chemical reaction in a processing chamber is manufactured. SOLUTION: A cover means which is made of a material shielding the weld zone from the gas chemical reaction and having resistance to the reaction and which shields the weld zone from the gas chemical reaction is additionally provided in the substrate treating equipment to prevent production and sticking of particles onto a wafer at low cost including running cost. The cover means is constituted by combining together a plate type shield portion which shields the weld zone from the gas chemical reaction by quartz and a cylindrical insert portion inserted into a gas intake opening in the processing chamber. COPYRIGHT: (C)2009,JPO&INPIT
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