| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve efficiency of hydrophilicity-imparting treatment to a treatment object surface. <P>SOLUTION: A first discharge space 15 nearly at atmospheric pressure is formed between first electrodes 12, 12 of a first plasma generation part 11, nitrogen (N<SB>2</SB>) of a first treatment gas is made to pass through it to be converted to plasma and provided with luminescence in an ultraviolet region. Oxygen (O<SB>2</SB>) of a second treatment gas is converted to ozone or a radical in a second space 25 of a second space formation part 21 to be provided with oxidizing capability or intensified. The first treatment gas after passing through the first discharge space 15 is sprayed onto a treatment position P from a first discharge passage 33 of a discharge part 30, and the second treatment gas from the second space 25 is sprayed onto the treatment position P while being merged into the first treatment gas in the vicinity of the treatment position P. The first discharge space 15 is arranged adjacent to the treatment position P relative to the second space 25. <P>COPYRIGHT: (C)2009,JPO&INPIT |
