| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for producing an electrostatic capacitance-type acceleration sensor having a high degree of reliability which neither use, where possible, massive equipments nor dangerous chemicals and includes a fixed electrode, a movable electrode, and a beam, that are made of metals. SOLUTION: This process for producing an electrostatic capacitance-type acceleration sensor comprising a fixed electrode 4, a movable electrode 6 also serving as a weight, and a beam 5 made of metals and placing them in the direction perpendicular to a substrate, includes the step of forming the fixed electrode 4, the movable electrode 6, and the beam 5 by wet plating process. COPYRIGHT: (C)2009,JPO&INPIT
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