| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of reducing an accidental error and a quantization error caused by the acquisition of the discrete light intensity information of Z-scanning. SOLUTION: This three-dimensional shape measuring device is equipped with a moving means for moving a sample position relatively in the optical axis direction to an objective lens; a rotation number acquisition means for acquiring the number of times for generating three-dimensional shape information; a movement control means for moving the sample position relatively and discretely to the objective lens by controlling the moving means; and a three-dimensional shape information generation means for performing, in the number of acquisition times, processing for acquiring the discrete light intensity information of observation light from a sample corresponding to a change of the sample position, acquiring the sample position where the maximum light intensity is acquired based on the light intensity information, and generating the three-dimensional shape information based on the sample position. When the three-dimensional shape information is generated in the number of acquisition times, the movement control means controls the moving means so that each sample position where the light intensity information is acquired discretely is made to differ from each other at each generation of the three-dimensional shape information. COPYRIGHT: (C)2009,JPO&INPIT
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