<p>In a multiwire saw, a wire string formed by winding a wire between a plurality of rollers having a plurality of wire grooves is traveled, a work is press-fitted to the wire while working fluid comprising grains is supplied to the wire string and the work is cut into a plurality of wafers. The wire saw is provided with a first holding member fixing and holding a face opposite to a face where cutting is started in the work by adhesive through a dummy member and a second holding member sandwiching the work from both sides of the work in an arranging direction of the wire and fixing and holding it.</p>
申请公布号
WO2009072176(A1)
申请公布日期
2009.06.11
申请号
WO2007JP73328
申请日期
2007.12.03
申请人
MIMURA, SEIICHI;MITSUBISHI ELECTRIC CORPORATION;NISHIDA, HIROKAZU;KAWASAKI, TAKAFUMI