发明名称 PIEZOELECTRIC VIBRATOR AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which is reduced in the deterioration of a coupling factor in frequency adjustment. <P>SOLUTION: A first electrode and a second electrode are provided on both principal surfaces of a piezoelectric material 1 to form a first piezoelectric vibrator, and a third electrode and a fourth electrode are provided to form a second piezoelectric vibrator. A first load film and a second load film are formed on outermost surfaces of the first and second electrodes in order to adjust the frequency of the first piezoelectric vibrator, and a third load film and a fourth load film are formed on outermost surfaces of the third and fourth electrodes in order to adjust the frequency of the second piezoelectric vibrator. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009130478(A) 申请公布日期 2009.06.11
申请号 JP20070301114 申请日期 2007.11.21
申请人 PANASONIC CORP 发明人 IWASAKI TOSHIHIRO;NAKATSUKA HIROSHI;ONISHI KEIJI
分类号 H03H9/54;H01L41/09;H01L41/18;H01L41/22;H01L41/253;H03H3/02;H03H9/17;H03H9/70 主分类号 H03H9/54
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