摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which is reduced in the deterioration of a coupling factor in frequency adjustment. <P>SOLUTION: A first electrode and a second electrode are provided on both principal surfaces of a piezoelectric material 1 to form a first piezoelectric vibrator, and a third electrode and a fourth electrode are provided to form a second piezoelectric vibrator. A first load film and a second load film are formed on outermost surfaces of the first and second electrodes in order to adjust the frequency of the first piezoelectric vibrator, and a third load film and a fourth load film are formed on outermost surfaces of the third and fourth electrodes in order to adjust the frequency of the second piezoelectric vibrator. <P>COPYRIGHT: (C)2009,JPO&INPIT |