| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized inexpensive sensor having a small load of a control operation part, capable of detecting highly accurately acceleration-angular velocity and a magnetic azimuth, and a detection device using it. <P>SOLUTION: This composite sensor 1 is constituted of a substrate 2, a lower sealing plate 3 and an upper sealing plate 4, an elastic beam part 5 whose one end is connected to the inner surface of the substrate 2, a weight part 6 mounted on a center part of the elastic beam part 5, an excitation coil 7 formed on the under surface of the weight part 6, a magnetic detection element 8 arranged on a part facing to the weight part 6 on the upper surface of the lower sealing plate 3, and a pair of excitation mechanisms 9 formed oppositely on the upper surface of the weight part 6 and on the under surface of the upper sealing plate 4. Supply of an excitation current to the excitation coil 7 and supply of excitation current to the excitation mechanisms 9 are controlled, and the acceleration, the angular velocity and the magnetic azimuth in the three mutually-orthogonal directions are detected from output from the magnetic detection element 8. <P>COPYRIGHT: (C)2009,JPO&INPIT |
