| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device and method that remove foreign matter by a reliable washing without causing any damage or wearing on a probe needle and carries out the cleaning of the probe needle as simply as possible without requiring a great deal of change in the constitution of equipment. SOLUTION: Cleaning is conducted with a moving direction turn performed at a turning angle of 90°and by going through a plurality of cycles where a cleaning action is repeated 4 times as one cycle. Here, the cleaning action is carried out, for example, by a helical motion in the plurality of cycles, so that the cleaning action of each cycle is conducted at different positions within a cleaning surface 11a (in the drawing, it is marked as a contact position). In the example of the drawing, cleaning actions in two cycles (a series of cleaning actions of (1) to (5) and a series of cleaning actions of (5) to (9)) are shown. COPYRIGHT: (C)2009,JPO&INPIT
|
