SCRIBING DEVICE AND METHOD, AND SUBSTRATE CUTOFF DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a scribing device and method, and a substrate cutoff device using the same. SOLUTION: The scribing device comprises scribing units arranged in parallel so that a plurality of scribing lines parallel to each other can be simultaneously formed in a mother substrate. A spacing regulation unit is provided to regulate the spacing between the scribing units so that the spacing between a plurality of simultaneously formed scribing lines parallel to each other can be changed. COPYRIGHT: (C)2009,JPO&INPIT