| 摘要 |
PROBLEM TO BE SOLVED: To obtain directional characteristics in vibration detection, without having to depend on electrical addition. SOLUTION: This vibration detection device is equipped with a Michelson interferometer, constituted to include a first vibration film 151 and a second vibration film 152, capable of reflecting the laser light emitted from a laser light source 10 and a polarization beam splitter 130 for separating the laser light into first and second optical paths by the polarization beam splitter 130, and forming an interference fringe, by allowing reflected light reflected by the first vibration film 151 in the first optical path, to make them mutually interfere with the reflected light reflected by the second vibrating film 152 in the second optical path; and a detection means for quantizing and detecting each vibration of the first vibrating film 151 and the second vibrating film 152, based on the interference fringe. COPYRIGHT: (C)2009,JPO&INPIT
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