发明名称 MICRODROPLET COATER
摘要 According to an aspect of the present invention, there is provided a microdroplet coater including: a container in which a substrate is placed; a coating solution discharge unit that is installed in the container and that processes a coating solution containing a solute and a solvent into microdroplets to discharge the microdroplets onto the substrate; and an atmosphere adjustment unit that adjusts an atmosphere in the container so that the solvent is prevented from evaporating.
申请公布号 US2009145354(A1) 申请公布日期 2009.06.11
申请号 US20080323879 申请日期 2008.11.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKAMURA YOSHIAKI
分类号 B05C5/00 主分类号 B05C5/00
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