SURFACE MICROSTRUCTURE MANUFACTURING METHOD, DIAMOND NANO ELECTRODE MANUFACTURING METHOD, AND ELECTRODE BODY THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a surface microstructure manufacturing method using a nano diamond fine particle, and to provide a diamond nano electrode manufacturing method which uses the microstructure.

SOLUTION: There are provided a surface microstructure manufacturing method for manufacturing an unevenness P3 of nano meter order through dry etching by seeding a nano diamond fine particle P2 on the test piece surface of a test piece P1 composed of silicon, gallium arsenide, and diamond and using this as a minute hard mask, and a diamond nano electrode manufacturing method using the microstructure.

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