| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that an optical scanner in which a driving signal for an MEMS device is generated by the detected result of a BD signal has no means to detect the state of a trouble of the MEMS device, and the MEMS device is varied in characteristics due to change with lapse of time or environment such as ambient temperature, humidity or the like, a resonance frequency varies and the performance of optical scanning is deteriorated due to variance in resonance frequency. SOLUTION: The optical scanner composed of a movable element which scans light by oscillation has: a means which generates a signal to drive the movable element; a means which detects the voltage of the signal; and a means which decides the trouble of the movable element on the basis of the detected voltage. The optical scanner composed of a movable element which scans light by oscillation has: a means which detects the resonance frequency of the movable element; a means which generates the signal to drive the movable element on the basis of the detected resonance frequency; and the means which detects the voltage of the generated signal, wherein the frequency of the driving signal is reset on the basis of the detected voltage. COPYRIGHT: (C)2009,JPO&INPIT
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