发明名称 |
Method of fabricating optical fiber using an isothermal, low pressure plasma deposition technique |
摘要 |
An isothermal, low pressure-based process of depositing material within a substrate has been developed, and is particularly useful in forming an optical fiber preform results in creating an extremely narrow reaction zone within which a more uniform and efficient deposition will occur. Sets of isothermal plasma operating conditions have been found that create a narrow deposition zone, assuring that the deposited material is clear glass rather than soot particles. The exhaust end of the tube is connected to a vacuum system which is in turn connected to a scrubber apparatus for removal and neutralization of reaction by-products. The operating conditions are selected such that the hot plasma does not transfer a substantial amount of heat to the substrate tube, where the presence of such heat has been found to result in vaporizing the reactant material (creating soot) and developing hot spots. |
申请公布号 |
US2009148613(A1) |
申请公布日期 |
2009.06.11 |
申请号 |
US20070001174 |
申请日期 |
2007.12.10 |
申请人 |
FURUKAWA ELECTRIC NORTH AMERICA, INC. |
发明人 |
FLEMING JAMES W.;ZYDZIK GEORGE J. |
分类号 |
B05D1/08;C23C16/54 |
主分类号 |
B05D1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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