发明名称 Method of fabricating optical fiber using an isothermal, low pressure plasma deposition technique
摘要 An isothermal, low pressure-based process of depositing material within a substrate has been developed, and is particularly useful in forming an optical fiber preform results in creating an extremely narrow reaction zone within which a more uniform and efficient deposition will occur. Sets of isothermal plasma operating conditions have been found that create a narrow deposition zone, assuring that the deposited material is clear glass rather than soot particles. The exhaust end of the tube is connected to a vacuum system which is in turn connected to a scrubber apparatus for removal and neutralization of reaction by-products. The operating conditions are selected such that the hot plasma does not transfer a substantial amount of heat to the substrate tube, where the presence of such heat has been found to result in vaporizing the reactant material (creating soot) and developing hot spots.
申请公布号 US2009148613(A1) 申请公布日期 2009.06.11
申请号 US20070001174 申请日期 2007.12.10
申请人 FURUKAWA ELECTRIC NORTH AMERICA, INC. 发明人 FLEMING JAMES W.;ZYDZIK GEORGE J.
分类号 B05D1/08;C23C16/54 主分类号 B05D1/08
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