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发明名称
VORRICHTUNG ZUM EINSPANNEN UND POSITIONIEREN EINES VERDAMPFERSCHIFFCHENS
摘要
申请公布号
DE502005007216(D1)
申请公布日期
2009.06.10
申请号
DE200550007216T
申请日期
2005.07.27
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
HEIN, STEFAN;KLEIN, WOLFGANG
分类号
C23C14/26
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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