TEMPERATURE CORRECTION DEVICE FOR CVD APPARATUS AND METHOD OF CORRECTION THEREOF,申请号KR20060121243-传众专利搜索

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发明名称	TEMPERATURE CORRECTION DEVICE FOR CVD APPARATUS AND METHOD OF CORRECTION THEREOF
摘要
申请公布号	KR100901918(B1)	申请公布日期	2009.06.10
申请号	KR20060121243	申请日期	2006.12.04
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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