EXHAUST UNIT AND METHOD, AND APPARATUS FOR TREATING SUBSTRATE WITH THE EXHAUST UNIT

摘要

An exhaust unit, an exhausting method, and a substrate processing apparatus are provided to control an exhaust quantity of process units by integrally exhausting the exhaust gas from each process unit. A plurality of exhaust lines(210) are connected to process units. The exhaust gas inside each process unit is exhausted through the exhaust lines. A housing(222) is connected to each exhaust line and receives the exhaust gas. A controller(228) is formed in one side wall of the housing and controls the opening. The exhausted gas integrated in the housing is exhausted through the exhaust line. A collecting member recovers the organic gas of the exhaust gas.