CHEMICAL DELIVERY SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A chemical supplying device for manufacturing a semiconductor is provided to supply the chemical in an error of a level sensor by using a chemical sensor and the existing level sensor. A chemical sensor is equipped in a chemical supply line(40). A chemical sensor senses the flow of the chemical and transmits the sensed result to a controller. A refill line(30) is extended and connected to the chemical supply line. If the controller senses the abnormal flow of the chemical through a chemical sensor, the controller directly supplies the chemical from a bulk canister to a process chamber through the refill line and the chemical supply line without passing through a process canister.