THERMALLY ISOLATED CRYOPANEL FOR VACUUM DEPOSITION SYTEMS,申请号EP20070838731-传众专利搜索

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发明名称	THERMALLY ISOLATED CRYOPANEL FOR VACUUM DEPOSITION SYTEMS
摘要
申请公布号	EP2066415(A2)	申请公布日期	2009.06.10
申请号	EP20070838731	申请日期	2007.09.24
申请人	VEECO INSTRUMENTS INC.	发明人	GOTTHOLD, DAVID, WILLIAM;BRESNAHAN, RICHARD, CHARLES;PRIDDY, SCOTT, WAYNE;O'STEEN, MARK, LEE
分类号	B01D8/00	主分类号	B01D8/00
代理机构		代理人
主权项
地址

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