Verfahren zum Liefern unterschiedlicher Frequenzeinstellungen bei einem akustischen Dünnfilmvolumenresonator- (FBAR-) Filter und Vorrichtung, die das Verfahren beinhaltet

摘要

A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. A resonator is fabricated on a substrate, and its top electrode 56 is oxidized to form a oxide layer 58. For a substrate having multiple resonators, the top electrode 56 of only selected resonator is oxidized to provide resonators having different resonance frequencies on the same substrate.