| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a polysilicon layer of a large crystal particle size in a channel region, related to a thin-film element used as a switching element of an active matrix liquid-crystal display. SOLUTION: An amorphous silicon film 2 is formed on a glass substrate 1, on which a glass film 3 is formed. A modulation region 4 is so formed that the optical property of the glass film 3 at least changes in the direction parallel to the surface of the glass substrate 1. A laser beam 5 is made incident on the glass film 3, whose intensity distribution is modulated with the glass film 3 and made incident on the amorphous silicon film 2, so that the amorphous silicon film is poly-crystallized.</p> |
