| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical waveguide grating type optical component having a desired period while a low cost and a high mass productivity are secured. SOLUTION: A phase mask 2 is prepared which is manufactured from resin and which has a diffraction grating face 2a formed with a diffraction grating 4 of a prescribed period and an incident face 2b opposing the diffraction grating face 2a. This phase mask 2 is held in a manner that the diffraction grating face 2a is nearly parallel and opposite to an optical waveguide 5. While the temperature of the phase mask 2 is adjusted and maintained roughly at a prescribed temperature, the optical waveguide 5 is irradiated and exposed with ultraviolet rays UV from the incident face 2b side through the phase mask 2 to form a grating in the exposed part of the optical waveguide 5. COPYRIGHT: (C)2006,JPO&NCIPI |
